Project for Energy Storage on a Chip for MEMS

Abstract:

A new project with a budget of 262 thousands Euro was motivated by the lack of micromachined energy storage solutions that can be integrated with a MEMS harvester on a chip with a specific circuitry. These key components of the system are highly needed for autonomous microsystems and have to be integrated to enable an energy-autonomous, but efficient operation The targeted energy storage device needs to be charged very slowly from harvesters with output energies in the μWs range. As a consequence, tailored materials and technologies for the realization of thin-film capacitors compatible with CMOS technology are of utmost importance. Target capacitance value about one hundred μF/cm², low loss factor and low leakage currents are the expected properties of these devices.