Passive Components Blog
No Result
View All Result
  • Home
  • NewsFilter
    • All
    • Aerospace & Defence
    • Antenna
    • Applications
    • Automotive
    • Capacitors
    • Circuit Protection Devices
    • electro-mechanical news
    • Filters
    • Fuses
    • Inductors
    • Industrial
    • Integrated Passives
    • inter-connect news
    • Market & Supply Chain
    • Market Insights
    • Medical
    • Modelling and Simulation
    • New Materials & Supply
    • New Technologies
    • Non-linear Passives
    • Oscillators
    • Passive Sensors News
    • Resistors
    • RF & Microwave
    • Telecommunication
    • Weekly Digest

    Vishay Releases Industry First Automotive SMD Y1 Safety Ceramic Capacitors

    Researchers Enhanced 2D Ferromagnets Performance

    Bourns Releases Two High Current Common Mode Choke Models

    Electronics Weekly Announcing Finalists for Elektra Awards 2025

    Exxelia Exhibit at Electronica India September 17–19, 2025

    Würth Elektronik Announces 2025 Digital WE Days Virtual Conference

    VINATech Unveils Hybrid Energy Storage System to Revolutionize Grid Stability and Power Delivery

    SCHURTER Releases High Performance EV-Fuse

    Panasonic Industry to Double Production of MEGTRON PCB Materials

    Trending Tags

    • Ripple Current
    • RF
    • Leakage Current
    • Tantalum vs Ceramic
    • Snubber
    • Low ESR
    • Feedthrough
    • Derating
    • Dielectric Constant
    • New Products
    • Market Reports
  • VideoFilter
    • All
    • Antenna videos
    • Capacitor videos
    • Circuit Protection Video
    • Filter videos
    • Fuse videos
    • Inductor videos
    • Inter-Connect Video
    • Non-linear passives videos
    • Oscillator videos
    • Passive sensors videos
    • Resistor videos

    Ripple Steering in Coupled Inductors: SEPIC Case

    SEPIC Converter with Coupled and Uncoupled Inductors

    Coupled Inductors in SEPIC versus Flyback Converters

    Non-Linear MLCC Class II Capacitor Measurements Challenges

    Percolation Phenomenon and Reliability of Molded Power Inductors in DC/DC converters

    Root Causes and Effects of DC Bias and AC in Ceramic Capacitors

    How to Calculate the Output Capacitor for a Switching Power Supply

    Switched Capacitor Converter Explained

    Understanding Inductor Dot Markings and Their Application in LTspice

    Trending Tags

    • Capacitors explained
    • Inductors explained
    • Resistors explained
    • Filters explained
    • Application Video Guidelines
    • EMC
    • New Products
    • Ripple Current
    • Simulation
    • Tantalum vs Ceramic
  • Knowledge Blog
  • Suppliers
    • Who is Who
  • Events
  • Home
  • NewsFilter
    • All
    • Aerospace & Defence
    • Antenna
    • Applications
    • Automotive
    • Capacitors
    • Circuit Protection Devices
    • electro-mechanical news
    • Filters
    • Fuses
    • Inductors
    • Industrial
    • Integrated Passives
    • inter-connect news
    • Market & Supply Chain
    • Market Insights
    • Medical
    • Modelling and Simulation
    • New Materials & Supply
    • New Technologies
    • Non-linear Passives
    • Oscillators
    • Passive Sensors News
    • Resistors
    • RF & Microwave
    • Telecommunication
    • Weekly Digest

    Vishay Releases Industry First Automotive SMD Y1 Safety Ceramic Capacitors

    Researchers Enhanced 2D Ferromagnets Performance

    Bourns Releases Two High Current Common Mode Choke Models

    Electronics Weekly Announcing Finalists for Elektra Awards 2025

    Exxelia Exhibit at Electronica India September 17–19, 2025

    Würth Elektronik Announces 2025 Digital WE Days Virtual Conference

    VINATech Unveils Hybrid Energy Storage System to Revolutionize Grid Stability and Power Delivery

    SCHURTER Releases High Performance EV-Fuse

    Panasonic Industry to Double Production of MEGTRON PCB Materials

    Trending Tags

    • Ripple Current
    • RF
    • Leakage Current
    • Tantalum vs Ceramic
    • Snubber
    • Low ESR
    • Feedthrough
    • Derating
    • Dielectric Constant
    • New Products
    • Market Reports
  • VideoFilter
    • All
    • Antenna videos
    • Capacitor videos
    • Circuit Protection Video
    • Filter videos
    • Fuse videos
    • Inductor videos
    • Inter-Connect Video
    • Non-linear passives videos
    • Oscillator videos
    • Passive sensors videos
    • Resistor videos

    Ripple Steering in Coupled Inductors: SEPIC Case

    SEPIC Converter with Coupled and Uncoupled Inductors

    Coupled Inductors in SEPIC versus Flyback Converters

    Non-Linear MLCC Class II Capacitor Measurements Challenges

    Percolation Phenomenon and Reliability of Molded Power Inductors in DC/DC converters

    Root Causes and Effects of DC Bias and AC in Ceramic Capacitors

    How to Calculate the Output Capacitor for a Switching Power Supply

    Switched Capacitor Converter Explained

    Understanding Inductor Dot Markings and Their Application in LTspice

    Trending Tags

    • Capacitors explained
    • Inductors explained
    • Resistors explained
    • Filters explained
    • Application Video Guidelines
    • EMC
    • New Products
    • Ripple Current
    • Simulation
    • Tantalum vs Ceramic
  • Knowledge Blog
  • Suppliers
    • Who is Who
  • Events
No Result
View All Result
Passive Components Blog
No Result
View All Result

IMEC Demonstrated How to Reduce Ruthenium Metal Line Resistance at Tight Metal Pitches

11.7.2022
Reading Time: 2 mins read
A A
Cross-section TEMs of Ru lines with 18nm metal pitch: (left) AR 3, (right) AR 6. The TEMs demonstrate a nearly vertical profile of the Ru lines and scalability of the current scheme towards higher ARs. Source: IMEC

Cross-section TEMs of Ru lines with 18nm metal pitch: (left) AR 3, (right) AR 6. The TEMs demonstrate a nearly vertical profile of the Ru lines and scalability of the current scheme towards higher ARs. Source: IMEC

IMEC, a world-leading research and innovation hub in nanoelectronics and digital technologies, presented at the 2022 IEEE International Interconnect Technology Conference (IITC 2022) options to reduce the metal line resistance at tight metal pitches, mitigating the resistance / capacitance (RC) increase of future interconnects using direct metal patterning.

For the first time, high aspect ratio (AR=6) processing of ruthenium (Ru) in a semi-damascene fashion is experimentally shown to result in about 40% resistance reduction without sacrificing area. Additional simulations confirm the benefits at circuit level in combination with airgaps as dielectrics. A complementary experimental study shows that the reliability of semi-damascene with airgaps is competitive when compared to dual-damascene with low-k dielectrics.

RelatedPosts

Vishay Releases Industry First Automotive SMD Y1 Safety Ceramic Capacitors

Researchers Enhanced 2D Ferromagnets Performance

Bourns Releases Two High Current Common Mode Choke Models

After providing the first experimental demonstration of a functional two-metal-level semi-damascene module at 18nm metal pitch, AR=3, with fully self-aligned vias at VLSI 2022, imec proposes to extend this integration scheme to further reduce the line resistance of the Ru interconnects, while keeping the same footprint. This can be achieved by high-AR processing of the Ru lines using an advanced subtractive metal etch process.

Zsolt Tokei: “We measured a significant line resistance reduction of about 40% on Ru lines with AR=6 compared to lines with conventional AR=3. In addition, we showed the benefits at circuit level of implementing high-AR semi-damascene lines with airgaps.” In a benchmark study, IMEC also demonstrated that the semi-damascene flow with airgaps is reliable with more than 10 years lifetime.

“With no less than 10 oral presentations at this year’s IITC, addressing the main challenges in interconnect scaling, IMEC has a proven path to push the interconnect roadmap for the coming ten years,” concludes Zsolt Tokei.

“The papers cover advances in semi-damascene integration as a promising interconnect scheme for future logic nodes, memory technologies and highlight progress in middle-of-line (MOL) metallization schemes, dielectrics, alternative metals exploration, and reliability.”

Related

Source: IITC 2022

Recent Posts

Vishay Releases Industry First Automotive SMD Y1 Safety Ceramic Capacitors

17.9.2025
5

Researchers Enhanced 2D Ferromagnets Performance

16.9.2025
5

Electronics Weekly Announcing Finalists for Elektra Awards 2025

16.9.2025
8

Exxelia Exhibit at Electronica India September 17–19, 2025

15.9.2025
28

Würth Elektronik Announces 2025 Digital WE Days Virtual Conference

15.9.2025
11

VINATech Unveils Hybrid Energy Storage System to Revolutionize Grid Stability and Power Delivery

15.9.2025
18

5th PCNS Awards Outstanding Passive Component Papers

17.9.2025
61

TDK Releases Ultra-small PFC Capacitors

10.9.2025
35

KYOCERA AVX Releases Novel Mini BME Stacked Ceramic Capacitors

10.9.2025
29

Vishay Releases Class 1 Leaded High Voltage Ceramic Disc Capacitors

10.9.2025
23

Upcoming Events

Sep 22
September 22 @ 13:00 - September 25 @ 15:15 EDT

Pre Cap Visual Inspection per Mil-Std-883 (TM 2017)

Sep 30
September 30 @ 12:00 - October 2 @ 14:00 EDT

MIL-Std-883 TM 2010

Oct 17
12:00 - 14:00 EDT

External Visual Inspection per MIL-STD-883 TM 2009

Oct 20
October 20 - October 23

Digital WE Days 2025 – Virtual Conference

Oct 21
October 21 @ 12:00 - October 23 @ 14:15 EDT

Space and Military Standards for Hybrids and RF Microwave Modules

View Calendar

Popular Posts

  • Buck Converter Design and Calculation

    0 shares
    Share 0 Tweet 0
  • Boost Converter Design and Calculation

    0 shares
    Share 0 Tweet 0
  • Flyback Converter Design and Calculation

    0 shares
    Share 0 Tweet 0
  • LLC Resonant Converter Design and Calculation

    0 shares
    Share 0 Tweet 0
  • Dual Active Bridge (DAB) Topology Explained

    0 shares
    Share 0 Tweet 0
  • Ripple Current and its Effects on the Performance of Capacitors

    3 shares
    Share 3 Tweet 0
  • What is a Dielectric Constant and DF of Plastic Materials?

    4 shares
    Share 4 Tweet 0
  • SEPIC Converter Design and Calculation

    0 shares
    Share 0 Tweet 0
  • How to Design an Inductor

    0 shares
    Share 0 Tweet 0
  • Core Materials, Permeability and Their Losses

    0 shares
    Share 0 Tweet 0

Newsletter Subscription

 

Passive Components Blog

© EPCI - Leading Passive Components Educational and Information Site

  • Home
  • Privacy Policy
  • EPCI Membership & Advertisement
  • About

No Result
View All Result
  • Home
  • Knowledge Blog
  • Premium Suppliers

© EPCI - Leading Passive Components Educational and Information Site

This website uses cookies. By continuing to use this website you are giving consent to cookies being used. Visit our Privacy and Cookie Policy.
Go to mobile version